M. L. Johnston, H. Edrees, I. Kymissis, and K. L. Shepard, “Integrated VOC Vapor Sensing on FBAR-CMOS Array,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), pp. 846-849, 2012.
This paper reports first results of volatile organic compound (VOC) detection on a monolithically integrated film bulk acoustic resonator (FBAR) array on a silicon integrated circuit substrate. The combined sensor platform uses thin polymer layers as gas absorbers for individual FBAR functionalization, and frequency shifts are measured on-chip in response to changing VOC concentration. Integrating sensors, drive, and read- out functionality on a single CMOS die enables a robust, multiplex sensor platform and obviates external measurement equipment.